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MICRO TRIPLE-HOT-WIRE ANEMOMETER ON SMALL SIZED GLASS TUBE FABRICATED IN 5DOF UV LITHOGRAPHY SYSTEM
https://aist.repo.nii.ac.jp/records/2001961
https://aist.repo.nii.ac.jp/records/200196167a5e726-1eb1-42a9-8a97-93aba2d6aff6
| Item type | Research Data (v9)(1) | |||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| PubDate | 2015-01-01 | |||||||||
| Data name | ||||||||||
| Title | MICRO TRIPLE-HOT-WIRE ANEMOMETER ON SMALL SIZED GLASS TUBE FABRICATED IN 5DOF UV LITHOGRAPHY SYSTEM | |||||||||
| Language | en | |||||||||
| Description of data | ||||||||||
| Description Type | Abstract | |||||||||
| Description | This paper reports novel designed and fabricated micro airflow sensors based on the hot-wire sensing principle, i.e. gas cooling of electrically heated resistance. With three micro Ti/Pt hot-wire components with width of 50 µm and thickness of 130 nm fabricated on a glass tube (outer diameter of 2.8mm and inner diameter of 2.1mm) in five degrees of freedom (5DOF) UV lithography system with multi-layer alignment, the sensors on a cylindrical base have demonstrated high sensitivity, fast response time and ability to detect wind speed and direction. | |||||||||
| Language | en | |||||||||
| Author (Creator) name |
YANG Zhuoqing
× YANG Zhuoqing
× 張 毅
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| Access Rights | ||||||||||
| Access Rights | open access | |||||||||
| Access Rights URI | http://purl.org/coar/access_right/c_abf2 | |||||||||
| APC | ||||||||||
| APC | Not required | |||||||||
| Rights Holder | ||||||||||
| Right Holder Name | YANG Zhuoqing | |||||||||
| Language | en | |||||||||
| Publisher | ||||||||||
| Publisher | IEEE | |||||||||
| Language | en | |||||||||
| Date | ||||||||||
| Date | 2015-01-01 | |||||||||
| Date Type | Issued | |||||||||
| Language | ||||||||||
| Language | eng | |||||||||
| Resource Type | ||||||||||
| Resource Type Identifier | http://purl.org/coar/resource_type/c_6501 | |||||||||
| Resource Type | journal article | |||||||||
| Identifier | ||||||||||
| Identifier | 10.1109/MEMSYS.2015.7051057 | |||||||||
| Identifier Type | DOI | |||||||||
| Relation | ||||||||||
| Relation Type | isVersionOf | |||||||||
| Identifier Type | URI | |||||||||
| Related Identifier | http://ieeexplore.ieee.org/document/7051057/ | |||||||||
| Language | ja | |||||||||
| Related Title | 関連 URI | |||||||||
| Source Title | ||||||||||
| Source Title | Proceedings of MEMS 2015 | |||||||||
| Language | en | |||||||||
| Page Start | ||||||||||
| Start Page | 714 | |||||||||
| Page End | ||||||||||
| End Page | 717 | |||||||||
