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Dependence of dielectric constants, leakage currents, and ferroelectric hystereses on Hf0.5Zr0.5O2 thicknesses in MIM Capacitors
https://aist.repo.nii.ac.jp/records/2001874
https://aist.repo.nii.ac.jp/records/2001874eb02fc55-bfd6-4140-82c9-3e1e1063f700
| Item type | Research Data (v9)(1) | |||||||||||||
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| PubDate | 2014-01-01 | |||||||||||||
| Data name | ||||||||||||||
| Title | Dependence of dielectric constants, leakage currents, and ferroelectric hystereses on Hf0.5Zr0.5O2 thicknesses in MIM Capacitors | |||||||||||||
| Language | en | |||||||||||||
| Description of data | ||||||||||||||
| Description Type | Abstract | |||||||||||||
| Description | Ferroelectricity is attractive for the functionalization of electronic devices. It is valuable not only for memory applications, but also for logic devices that materialize a steep subthreshold slope [1]. Existence of ferroelectric property in metastable HfO2–based systems has been recently reported and widely investigated [2-6]. These HfO2-based systems are friendly with CMOS process because they are free from lead and bismuth. Ferroelectric properties in these systems are closely correlated with the chemical composition of metal elements [3, 5] and film thicknesses [6]. One of the key processes is the capped-annealing (Cap-PDA) that promotes formation of metastable crystalline phases in HfO2 systems [7]. In this work, focusing on Hf0.5Zr0.5O2 films, we examined the impact of film thickness on dielectric constant, leakage current, and ferroelectric switching systematically. | |||||||||||||
| Language | en | |||||||||||||
| Author (Creator) name |
右田 真司
× 右田 真司
× 太田 裕之
× 森田 行則
× 昌原 明植
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| Access Rights | ||||||||||||||
| Access Rights | open access | |||||||||||||
| Access Rights URI | http://purl.org/coar/access_right/c_abf2 | |||||||||||||
| APC | ||||||||||||||
| APC | Not required | |||||||||||||
| Rights Holder | ||||||||||||||
| Right Holder Name | 右田 真司 | |||||||||||||
| Language | en | |||||||||||||
| Publisher | ||||||||||||||
| Publisher | 応用物理学会 | |||||||||||||
| Language | en | |||||||||||||
| Date | ||||||||||||||
| Date | 2014-01-01 | |||||||||||||
| Date Type | Issued | |||||||||||||
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| Language | eng | |||||||||||||
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| Resource Type Identifier | http://purl.org/coar/resource_type/c_6501 | |||||||||||||
| Resource Type | journal article | |||||||||||||
| Source Title | ||||||||||||||
| Source Title | 応用物理学会学術講演会予稿集 | |||||||||||||
| Language | en | |||||||||||||
