WEKO3
Item
High-Resolution Microfabrication Process in Half-pipe Substrate for 3D Photolithography Application
https://aist.repo.nii.ac.jp/records/2001770
https://aist.repo.nii.ac.jp/records/2001770941f363c-ff54-44df-a4ec-842696fd233e
| Item type | Research Data (v9)(1) | |||||||||||||||
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| PubDate | 2014-01-01 | |||||||||||||||
| Data name | ||||||||||||||||
| Title | High-Resolution Microfabrication Process in Half-pipe Substrate for 3D Photolithography Application | |||||||||||||||
| Language | ja | |||||||||||||||
| Description of data | ||||||||||||||||
| Description Type | Abstract | |||||||||||||||
| Description | We have successfully established a new fabrication process for preparing fine patterns in a half-pipe substrate and then fabricating 3D mask module. Using the as-prepared half-pipe 3D mask module, high efficiency photolithography process could be directly realized on tiny fibres. Therefore, more interesting applications could be developed further in E-textile industry. | |||||||||||||||
| Language | ja | |||||||||||||||
| Author (Creator) name |
二階堂 景
× 二階堂 景
× 林 政寛
× 張 毅
× 早瀬 仁則
× 伊藤 寿浩
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| Access Rights | ||||||||||||||||
| Access Rights | open access | |||||||||||||||
| Access Rights URI | http://purl.org/coar/access_right/c_abf2 | |||||||||||||||
| APC | ||||||||||||||||
| APC | Not required | |||||||||||||||
| Rights Holder | ||||||||||||||||
| Right Holder Name | 二階堂 景 | |||||||||||||||
| Language | ja | |||||||||||||||
| Publisher | ||||||||||||||||
| Publisher | The Japan Society of Applied Physics | |||||||||||||||
| Language | ja | |||||||||||||||
| Date | ||||||||||||||||
| Date | 2014-01-01 | |||||||||||||||
| Date Type | Issued | |||||||||||||||
| Language | ||||||||||||||||
| Language | jpn | |||||||||||||||
| Resource Type | ||||||||||||||||
| Resource Type Identifier | http://purl.org/coar/resource_type/c_6501 | |||||||||||||||
| Resource Type | journal article | |||||||||||||||
| Source Title | ||||||||||||||||
| Source Title | Proceedings of MNC2014 | |||||||||||||||
| Language | ja | |||||||||||||||
| Page Start | ||||||||||||||||
| Start Page | 20pm3_ps21 | |||||||||||||||
