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Variation Behavior of Tunnel-FETs Originated from Dopant Concentration at Source Region and Channel Edge Configuration
https://aist.repo.nii.ac.jp/records/2001683
https://aist.repo.nii.ac.jp/records/20016831ab0cd40-17ff-49ae-a2aa-93b26448b79a
| Item type | Research Data (v9)(1) | |||||||||||||||||
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| PubDate | 2014-01-01 | |||||||||||||||||
| Data name | ||||||||||||||||||
| Title | Variation Behavior of Tunnel-FETs Originated from Dopant Concentration at Source Region and Channel Edge Configuration | |||||||||||||||||
| Language | en | |||||||||||||||||
| Description of data | ||||||||||||||||||
| Description Type | Abstract | |||||||||||||||||
| Description | Tunnel-FETs (TFETs) and MOSFETs are fabricated on a single SOI substrate using the same device parameters and process conditions, and the variation behavior of TFETs is studied by highlighting the difference with MOSFETs. It is found that the variation behavior characteristic to TFET is mainly caused by two factors. One is the dopant concentration at source region. It seems to affect to the uniformity of tunneling current along the channel width. A heavier source concentration is necessary to suppress the variation. Another factor is the channel edge configuration. Electric fields are easily concentrated at channel edge regions, and it lowers the threshold voltage of TFETs locally. It brings about an asymmetric variation behavior. Suppression of these factors is indispensable for the integration of TFET circuits. | |||||||||||||||||
| Language | en | |||||||||||||||||
| Author (Creator) name |
右田 真司
× 右田 真司
× 松川 貴
× 森 貴洋
× 福田 浩一
× 森田 行則
× 藤原敏樹
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| Access Rights | ||||||||||||||||||
| Access Rights | open access | |||||||||||||||||
| Access Rights URI | http://purl.org/coar/access_right/c_abf2 | |||||||||||||||||
| APC | ||||||||||||||||||
| APC | Not required | |||||||||||||||||
| Rights Holder | ||||||||||||||||||
| Right Holder Name | 右田 真司 | |||||||||||||||||
| Language | en | |||||||||||||||||
| Publisher | ||||||||||||||||||
| Publisher | IEEE | |||||||||||||||||
| Language | en | |||||||||||||||||
| Date | ||||||||||||||||||
| Date | 2014-01-01 | |||||||||||||||||
| Date Type | Issued | |||||||||||||||||
| Language | ||||||||||||||||||
| Language | eng | |||||||||||||||||
| Resource Type | ||||||||||||||||||
| Resource Type Identifier | http://purl.org/coar/resource_type/c_6501 | |||||||||||||||||
| Resource Type | journal article | |||||||||||||||||
| Identifier | ||||||||||||||||||
| Identifier | 10.1109/ESSDERC.2014.6948814 | |||||||||||||||||
| Identifier Type | DOI | |||||||||||||||||
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| Relation Type | isVersionOf | |||||||||||||||||
| Identifier Type | URI | |||||||||||||||||
| Related Identifier | http://ieeexplore.ieee.org/document/6948814/ | |||||||||||||||||
| Language | ja | |||||||||||||||||
| Related Title | 関連 URI | |||||||||||||||||
| Source Title | ||||||||||||||||||
| Source Title | 2014 Proceedings of ESSDERC | |||||||||||||||||
| Language | en | |||||||||||||||||
